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<http://webisa.webdatacommons.org/163968791>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .
<http://webisa.webdatacommons.org/163968791>	<http://www.w3.org/ns/prov#value>	"invention is a chemically amplified resist composition which becomes a" .
<http://webisa.webdatacommons.org/163968791>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .