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<http://webisa.webdatacommons.org/prov/248508803>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/165699914> .
<http://webisa.webdatacommons.org/165699914>	<http://www.w3.org/ns/prov#value>	"FIG. 12A is a schematic sectional view illustrating a principal step in a method for manufacturing a compound semiconductor device according to a third embodiment;" .
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