<http://webisa.webdatacommons.org/prov/270972906>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/166710688> .
<http://webisa.webdatacommons.org/166710688>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/166710688>	<http://www.w3.org/ns/prov#value>	"The present invention relates to apparatus and methods for manufacturing integrated circuits and other electronic devices." .
<http://webisa.webdatacommons.org/166710688>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .