<http://webisa.webdatacommons.org/167846620>	<http://www.w3.org/ns/prov#value>	"Further, there is a large economic cost associated with the duration of such processes and tool and facility amortization represents a substantial fraction of device cost." .
<http://webisa.webdatacommons.org/prov/79959534>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/167846620> .
<http://webisa.webdatacommons.org/167846620>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/167846620>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .