<http://webisa.webdatacommons.org/prov/266253049>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/16887216> .
<http://webisa.webdatacommons.org/16887216>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/16887216>	<http://www.w3.org/ns/prov#value>	"In another embodiment, the reactant gas comprises, in addition to silicon or germanium, a nitrogen source, such as ammonia or hydrazine." .
<http://webisa.webdatacommons.org/16887216>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .