<http://webisa.webdatacommons.org/169084558>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/169084558>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/169084558>	<http://www.w3.org/ns/prov#value>	"FIG. 4A is a top image of a first photoresist pattern after the step of pattering the first photoresist layer." .
<http://webisa.webdatacommons.org/prov/465036762>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/169084558> .