<http://webisa.webdatacommons.org/169159798>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/169159798>	<http://www.w3.org/ns/prov#value>	"FIG. 4A is a schematic cross sectional view of a rim phase shift mask formed in accordance with the invention;" .
<http://webisa.webdatacommons.org/169159798>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.co.uk> .
<http://webisa.webdatacommons.org/prov/463932608>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/169159798> .