<http://webisa.webdatacommons.org/169553371>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/169553371>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/169553371>	<http://www.w3.org/ns/prov#value>	"Regarding the substrate, without limitation to the silicon substrate, a ceramic material including glass or a semi-conductor material including GaAs, etc." .
<http://webisa.webdatacommons.org/prov/298706156>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/169553371> .