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<http://webisa.webdatacommons.org/prov/45356705>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/170472960> .
<http://webisa.webdatacommons.org/170472960>	<http://www.w3.org/ns/prov#value>	"When the substrate 10 is made of materials other than silicon or aluminum nitride, and tantalum is used as the adhesion layer 14, various other diffusion-blocking tantalum compounds are formed depending upon the material of the substrate." .
<http://webisa.webdatacommons.org/170472960>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/58041783>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/170472960> .
<http://webisa.webdatacommons.org/prov/44841542>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/170472960> .