<http://webisa.webdatacommons.org/prov/98032527>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/171574100> .
<http://webisa.webdatacommons.org/171574100>	<http://www.w3.org/ns/prov#value>	"Through holes 30 x are provided in the base substrate 30, and a through electrode 31 made of conductor such as Cu, or the like is filled in the through holes 30 x respectively." .
<http://webisa.webdatacommons.org/171574100>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/171574100>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .