<http://webisa.webdatacommons.org/prov/467837765>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/17167080> .
<http://webisa.webdatacommons.org/17167080>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/17167080>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/17167080>	<http://www.w3.org/ns/prov#value>	"FIG. 10A is a timing chart showing the presence or absence of a wafer on a hot plate;" .