<http://webisa.webdatacommons.org/173223781>	<http://www.w3.org/ns/prov#value>	"It is also preferable that a material including at least one selected from the group consisting of Y2O3, Al2O3, HfO2, and TiO2 be used for the gate dielectric film." .
<http://webisa.webdatacommons.org/173223781>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/293719676>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/173223781> .
<http://webisa.webdatacommons.org/173223781>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .