<http://webisa.webdatacommons.org/prov/122776852>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/174056216> .
<http://webisa.webdatacommons.org/174056216>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/174056216>	<http://www.w3.org/ns/prov#value>	"The contact plugs 17 may be made of polysilicon or a metal such as aluminum or copper." .
<http://webisa.webdatacommons.org/prov/84492774>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/174056216> .
<http://webisa.webdatacommons.org/prov/363606097>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/174056216> .
<http://webisa.webdatacommons.org/174056216>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/452561205>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/174056216> .