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<http://webisa.webdatacommons.org/174814194>	<http://www.w3.org/ns/prov#value>	"FIGS. 2A and 2B are a schematic cross sectional view of an etcher used by experiments made by the present inventor and a graph showing experimental results." .
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<http://webisa.webdatacommons.org/174814194>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .