<http://webisa.webdatacommons.org/175198425>	<http://www.w3.org/ns/prov#value>	"FIG. 13A is a plan view showing a modification of the illumination area on a reticle, and FIG. 13B is a graph showing the illuminance distribution of the modification of the illumination area;" .
<http://webisa.webdatacommons.org/175198425>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/175198425>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/250249874>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/175198425> .