<http://webisa.webdatacommons.org/175607504>	<http://www.w3.org/ns/prov#value>	"A passivation layer 8 made of silicon nitride and a planarization layer 9 made of a photosensitive resin such as an acrylic resin are arranged on the source lines 6 a, the drain electrodes 6 b, and the upper electrodes 6 c in that order." .
<http://webisa.webdatacommons.org/prov/368055699>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/175607504> .
<http://webisa.webdatacommons.org/175607504>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/175607504>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .