<http://webisa.webdatacommons.org/177249728>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/334106573>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/177249728> .
<http://webisa.webdatacommons.org/177249728>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/177249728>	<http://www.w3.org/ns/prov#value>	"FIG. 4A is a plan view showing a wafer stage, and FIG. 4B is a schematic side view showing a partial cross section of wafer stage WST;" .