<http://webisa.webdatacommons.org/177423295>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/308325876>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/177423295> .
<http://webisa.webdatacommons.org/prov/153635529>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/177423295> .
<http://webisa.webdatacommons.org/prov/268184778>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/177423295> .
<http://webisa.webdatacommons.org/177423295>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/177423295>	<http://www.w3.org/ns/prov#value>	"Field of the Invention The present invention relates to a method and apparatus for manufacturing semiconductors for flat panel displays such as liquid crystal and plasma displays, semiconductor wafers and the like. 2." .