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<http://webisa.webdatacommons.org/178781054>	<http://www.w3.org/ns/prov#value>	"The dielectric 162 can include materials such as including Silicon Nitride (???SiN???), Silicon Carbide (???SiC???), and Tantalum (???Ta???) films." .
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<http://webisa.webdatacommons.org/178781054>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/178781054>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/328764638>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/178781054> .