<http://webisa.webdatacommons.org/180975273> <http://www.w3.org/ns/prov#value> "The amount of the metal oxide dissolver component to be added in the present invention is designed to be preferably 0.001 to 10 g, more preferably 0.01 to 1 g and particularly preferably 0.01 to 0.5 g based on the polishing slurry of 100 g in gross weight." . <http://webisa.webdatacommons.org/prov/516222528> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/180975273> . <http://webisa.webdatacommons.org/180975273> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/180975273> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.es> .