<http://webisa.webdatacommons.org/180975273>	<http://www.w3.org/ns/prov#value>	"The amount of the metal oxide dissolver component to be added in the present invention is designed to be preferably 0.001 to 10 g, more preferably 0.01 to 1 g and particularly preferably 0.01 to 0.5 g based on the polishing slurry of 100 g in gross weight." .
<http://webisa.webdatacommons.org/prov/516222528>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/180975273> .
<http://webisa.webdatacommons.org/180975273>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/180975273>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .