<http://webisa.webdatacommons.org/182318150>	<http://www.w3.org/ns/prov#value>	"However, it is to be understood that the method and apparatus will function quite successfully for other types of articles, such as photolithographic masks, and for other types of treatment." .
<http://webisa.webdatacommons.org/prov/271311072>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/182318150> .
<http://webisa.webdatacommons.org/182318150>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/182318150>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/prov/317056829>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/182318150> .