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<http://webisa.webdatacommons.org/183156563>	<http://www.w3.org/ns/prov#value>	"Following the fabrication of the transistor 38, an insulating layer 40, made of a material such as borophosphosilicate glass (BPSG) is formed over the semiconductor substrate 30 as well as the transistor 38." .
<http://webisa.webdatacommons.org/183156563>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/457733979>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/183156563> .