<http://webisa.webdatacommons.org/prov/463016188>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/185587547> .
<http://webisa.webdatacommons.org/185587547>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/185587547>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/185587547>	<http://www.w3.org/ns/prov#value>	"Method of claim 1, wherein the sacrificial structure is produced from a material including a photoresist, a metal, or an oxide." .