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<http://webisa.webdatacommons.org/prov/457733979>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/189564683> .
<http://webisa.webdatacommons.org/189564683>	<http://www.w3.org/ns/prov#value>	"Dielectric layer 33 includes materials such as undoped silicate glass, borophosphosilicate glass (BPSG) or phosphosilicate" .
<http://webisa.webdatacommons.org/189564683>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .