<http://webisa.webdatacommons.org/190942811>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/190942811>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/190942811>	<http://www.w3.org/ns/prov#value>	"Process gases are introduced (block 6109) containing silicon and other species such as hydrogen, nitrogen or oxygen." .
<http://webisa.webdatacommons.org/prov/266799892>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/190942811> .
<http://webisa.webdatacommons.org/prov/48414869>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/190942811> .