<http://webisa.webdatacommons.org/194873916>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/328764638>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/194873916> .
<http://webisa.webdatacommons.org/prov/61168525>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/194873916> .
<http://webisa.webdatacommons.org/194873916>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/194873916>	<http://www.w3.org/ns/prov#value>	"For example, the insulating films 11 are preferably made of insulating materials such as silicon nitride (SiN) or other suitable materials." .