<http://webisa.webdatacommons.org/195783139>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/195783139>	<http://www.w3.org/ns/prov#value>	"The present invention is directed to the design, fabrication and packaging of silicon capacitive pressure sensors for industrial and other applications where time stable operation over wide measurement ranges in difficult environments is required." .
<http://webisa.webdatacommons.org/195783139>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/130572453>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/195783139> .
<http://webisa.webdatacommons.org/prov/450766132>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/195783139> .