<http://webisa.webdatacommons.org/196834373>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/196834373>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/196834373>	<http://www.w3.org/ns/prov#value>	"ps for the deposition or abstraction of atoms, dimers, or other moieties, to or from materials including, but not limited to, covalent solids other than diamond, silicon, germanium or other semiconductors, intermetallics, ceramics, and metals." .
<http://webisa.webdatacommons.org/prov/56557855>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/196834373> .