<http://webisa.webdatacommons.org/196891233>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/prov/322808013>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/196891233> .
<http://webisa.webdatacommons.org/196891233>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/196891233>	<http://www.w3.org/ns/prov#value>	"A parylene layer may also act as the dielectric layer for the above-described capacitor, and two separate depositions steps may be used to optimize thicknesses and other characteristics of the respective layers." .