<http://webisa.webdatacommons.org/197497226>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/185241772>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/197497226> .
<http://webisa.webdatacommons.org/prov/363606107>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/197497226> .
<http://webisa.webdatacommons.org/197497226>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/197497226>	<http://www.w3.org/ns/prov#value>	"Similarly, they may also be preattached to the substrate 2. [0057] The cap preferably is formed of aluminum or other suitable metal or composite, and the substrate 2 is formed of dielectric layers containing interconnecting lines and through-vias." .