<http://webisa.webdatacommons.org/199251950>	<http://www.w3.org/ns/prov#value>	"Computer program 410 dictates the timing, mixture of gases, RF power levels, susceptor position, and other parameters of a particular process." .
<http://webisa.webdatacommons.org/199251950>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/318992109>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/199251950> .
<http://webisa.webdatacommons.org/prov/335068886>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/199251950> .
<http://webisa.webdatacommons.org/199251950>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .