<http://webisa.webdatacommons.org/prov/21724773>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/199566619> .
<http://webisa.webdatacommons.org/199566619>	<http://www.w3.org/ns/prov#value>	"patterns to a substrate such as a semiconductor or silicon wafer to" .
<http://webisa.webdatacommons.org/199566619>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/337963166>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/199566619> .
<http://webisa.webdatacommons.org/199566619>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .