<http://webisa.webdatacommons.org/prov/67272774>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/199877998> .
<http://webisa.webdatacommons.org/199877998>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/199877998>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/199877998>	<http://www.w3.org/ns/prov#value>	"Focused ion beam (FIB) systems are used for IC mask or reticle repair and imaging and other applications." .