<http://webisa.webdatacommons.org/200284440>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/200284440>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/200284440>	<http://www.w3.org/ns/prov#value>	"The holes in the ILD layer 1002 are filled with a suitable conductive material, such as tungsten, to form the number of contacts 1000." .
<http://webisa.webdatacommons.org/prov/57446325>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/200284440> .