<http://webisa.webdatacommons.org/200505018>	<http://www.w3.org/ns/prov#value>	"The present invention is particularly suitable when the fine line is obtained by being heated after the developing process, because it is considered that a stress generated when the size of the material obtained by development changes due to the heating is a great factor for peeling of end portions." .
<http://webisa.webdatacommons.org/200505018>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/267248633>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/200505018> .
<http://webisa.webdatacommons.org/200505018>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .