<http://webisa.webdatacommons.org/prov/457733979>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/200791265> .
<http://webisa.webdatacommons.org/200791265>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/200791265>	<http://www.w3.org/ns/prov#value>	"The two contacts 112 and 114 are located in a dielectric layer 116 that comprises a material such as borophosphosilicate glass (BPSG)." .
<http://webisa.webdatacommons.org/200791265>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .