<http://webisa.webdatacommons.org/201882993>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/436748801>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/201882993> .
<http://webisa.webdatacommons.org/prov/430710477>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/201882993> .
<http://webisa.webdatacommons.org/201882993>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/201882993>	<http://www.w3.org/ns/prov#value>	"A MgAl2O4(100) single crystal substrate 60 was cleaned in an organic solvent, such as acetone or ethanol, by ultrasonic agitation, and then a platinum thin film 62 having a thickness of 100 nm was formed thereon by a RF magnetron sputtering process." .