<http://webisa.webdatacommons.org/202875637>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/202875637>	<http://www.w3.org/ns/prov#value>	"For example, such a material includes oxides and nitrides such as silicon oxide (SiOx), silicon nitride (SixNy), titanium oxide (TiOx), and zirconium oxide (ZrOx), and multilayer films containing these components." .
<http://webisa.webdatacommons.org/prov/431582150>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/202875637> .
<http://webisa.webdatacommons.org/202875637>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/33646820>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/202875637> .