<http://webisa.webdatacommons.org/203174112>	<http://www.w3.org/ns/prov#value>	"For example, the residue may consist of various materials including silicon dioxide, silicon nitrate, various photoresist polymers, dopants, metals, metal oxides, dust, oils, and substrate particles, among others." .
<http://webisa.webdatacommons.org/203174112>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/45356719>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/203174112> .
<http://webisa.webdatacommons.org/203174112>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .