<http://webisa.webdatacommons.org/prov/396246330>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/203238215> .
<http://webisa.webdatacommons.org/203238215>	<http://www.w3.org/ns/prov#value>	"A system including such a heater is also useful for promoting reactions between wafers and reactive gases, for example, oxidation and nitridation." .
<http://webisa.webdatacommons.org/203238215>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/203238215>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .