<http://webisa.webdatacommons.org/prov/249871564>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/204798629> .
<http://webisa.webdatacommons.org/204798629>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/204798629>	<http://www.w3.org/ns/prov#value>	"Additionally, FIG. 2 is a plan view showing a part of the placement stage shown in FIG. 1 in enlargement.The placement stage 2 is a disk-shaped ceramic material having a circular surface (placement surface 2a) matching an object to be processed, such as a wafer, and a heater 4 embedded in the interior." .
<http://webisa.webdatacommons.org/prov/409241037>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/204798629> .
<http://webisa.webdatacommons.org/204798629>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .