<http://webisa.webdatacommons.org/prov/448318246>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/206012504> .
<http://webisa.webdatacommons.org/206012504>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/206012504>	<http://www.w3.org/ns/prov#value>	" 9, 2006Applied Materials Inc.Carrier head with a flexible membraneUS7074114 *Jan 16, 2003Jul 11, 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7101272Jan 15, 2005Sep 5, 2006Applied Materials, Inc.Carrier head for thermal drift compensationUS7121934May 18, 2005Oct 17, 2006Doosan Dnd Co., Ltd.Carrie" .
<http://webisa.webdatacommons.org/prov/447138768>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/206012504> .
<http://webisa.webdatacommons.org/206012504>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .