. . . . "For example, conductive layers 23 and lines 16 and 18 may be formed from metals such as refractory or transition metals, metal alloys, metalnitrides (e.g., refractory metal nitrides, Ti.sub.1-xAl.sub.xN.sub.y, Ta.sub.1-xAl.sub.xN.sub.y, W.sub.1-xAl.sub.xN.sub.y, Mo.sub.1-xAl.sub.xN.sub.y, etc.) m" .