<http://webisa.webdatacommons.org/208910562>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/208910562>	<http://www.w3.org/ns/prov#value>	"This invention relates to micromachined relays made from materials such as semiconductor materials." .
<http://webisa.webdatacommons.org/prov/61168503>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/208910562> .
<http://webisa.webdatacommons.org/208910562>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .