<http://webisa.webdatacommons.org/210930342>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/210930342>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/210930342>	<http://www.w3.org/ns/prov#value>	"However, according to the present invention, as a substrate, an arbitrary substrate formed of an insulating material such as silicon oxide, titanium oxide, acryl resin, epoxy resin, polyimide or the like can be used." .
<http://webisa.webdatacommons.org/prov/297664359>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/210930342> .
<http://webisa.webdatacommons.org/prov/292921973>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/210930342> .
<http://webisa.webdatacommons.org/prov/45356705>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/210930342> .