<http://webisa.webdatacommons.org/211067517>	<http://www.w3.org/ns/prov#value>	"However, this method is a manufacturing method in a case of a probe sheet structure where signal wires and a power source wire which are wring material in the probe sheet 9 d have been formed on the same or one face." .
<http://webisa.webdatacommons.org/211067517>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/387627540>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/211067517> .
<http://webisa.webdatacommons.org/211067517>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .