<http://webisa.webdatacommons.org/211087618>	<http://www.w3.org/ns/prov#value>	"R1 x SiH4-x (where R1 is a phenyl group or a vinyl group; and x is an integer of 1 to 3), the proportion of SiCH3 contained in the interlayer insulating film is much lower than contained in a conventional organic SOG film, though the dielectric constant thereof is equal to that of the conventional organic SOG film." .
<http://webisa.webdatacommons.org/211087618>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/130980806>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/211087618> .
<http://webisa.webdatacommons.org/prov/464017592>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/211087618> .
<http://webisa.webdatacommons.org/211087618>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .