<http://webisa.webdatacommons.org/211539190>	<http://www.w3.org/ns/prov#value>	"The contact plugs 202 a, 202 b and 202 c may use a metal such as polysilicon or tungsten as a conductive member." .
<http://webisa.webdatacommons.org/211539190>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/211539190>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/358765996>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/211539190> .
<http://webisa.webdatacommons.org/prov/414272451>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/211539190> .