<http://webisa.webdatacommons.org/prov/277576361>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/212526244> .
<http://webisa.webdatacommons.org/212526244>	<http://www.w3.org/ns/prov#value>	"Process parameters such as flow rate, temperature, pressure and the like can be controlled so as to provide a pad oxide layer 1007 having a predetermined thickness and good quality." .
<http://webisa.webdatacommons.org/prov/285847384>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/212526244> .
<http://webisa.webdatacommons.org/212526244>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/212526244>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freshpatents.com> .