<http://webisa.webdatacommons.org/212664291>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/140768242>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/212664291> .
<http://webisa.webdatacommons.org/212664291>	<http://www.w3.org/ns/prov#value>	"According to this structure, the first wire and the second wire made of the materials mainly composed of Cu are formed through the interlayer dielectric film." .
<http://webisa.webdatacommons.org/212664291>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .